Browsing by Author "Li, H."
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Sandwich method to grow high quality AlN by MOCVD
Demir, I.; Li, H.; Robin, Y.; McClintock, R.; Elagoz, S.; Razeghi, M. (IOP PUBLISHING LTD, 2018)We report pulsed atomic layer epitaxy growth of a very high crystalline quality, thick (similar to 2 mu m) and crack-free AlN material on c-plane sapphire substrates via a sandwich method using metal organic chemical vapor ...